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Microelectomechanical Systems (MEMS)

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The MEMS thrust invents advanced devices and systems concepts for developing integrated microsystems using micro- and nano-scale fabrication techniques. Our inter-disciplinary research spans very diverse topics aimed at ubiquitous distribution of microsystems in the modern world. Topics such as chip-scale particle accelerators, rf mems filters and oscillators, hybrid insect microsystems, microprobes for surgery and bio-instrumentation and opto-mechanical inertial sensors, are among the current foci of the group.

Research Area Faculty

  Name Department Contact
al274.jpg Lal, Amit
Electrical and Computer Engineering Room 120 Phillips Hall
607 255-9374
mgs22.jpg Spencer, Michael G.
Electrical and Computer Engineering Room 418 Phillips Hall
607 257-1721