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SEM image of the fabricated graded-index bend (10 ?m scale), with an AFM scan in inset of a fabricated bend, showing the thickness profile in the silicon layer.
(a) Optical microscope image of the racetrack resonator. (b) SEM image of the cross-section of the silicon structure. The different thickness in the coupling region is a result of the slower oxidation rate in the gap region.
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